Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes

Oesterberg, Frederik WestergaardFrederik WestergaardOesterbergWitthoeft, Maria-LouiseMaria-LouiseWitthoeftDutta, ShibeshShibeshDuttaMeersschaut, JohanJohanMeersschautAdelmann, ChristophChristophAdelmannNielsen, Peter FormerPeter FormerNielsenHansen, OleOleHansenPetersen, Dirch HjorthDirch HjorthPetersen2021-10-262021-10-2620182158-3226https://imec-publications.be/handle/20.500.12860/31439Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probesJournal articlehttps://doi.org/10.1063/1.5010399