Selective self-assembled monolayer coating to enable Cu-to-Cu connection in dual damascene vias

Maestre Caro, ArantxaArantxaMaestre CaroTravaly, YoussefYoussefTravalyBeyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokeiMaes, GuidoGuidoMaesBorghs, GustaafGustaafBorghsArmini, SilviaSilviaArmini2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/22741Selective self-assembled monolayer coating to enable Cu-to-Cu connection in dual damascene viasJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931713000257