Assessment of N-type and P-type doping in (Al,Ga)N heterostructures by Scanning probe microscopy techniques

Minj, AlbertAlbertMinjZhao, MingMingZhaoBakeroot, BenoitBenoitBakerootParedis, KristofKristofParedisWouters, LennaertLennaertWoutersHantschel, ThomasThomasHantschelDecoutere, StefaanStefaanDecoutere2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36981Assessment of N-type and P-type doping in (Al,Ga)N heterostructures by Scanning probe microscopy techniquesOral presentation