Novel thin-film solid-composite electrolyte for 3D lithium-ion microbatteries by combining molecular and atomic layer deposition

Gandrud, Knut BjarneKnut BjarneGandrudHollevoet, SimonSimonHollevoetVan de Kerckhove, KevinKevinVan de KerckhovePut, BrechtBrechtPutCreatore, AdrianaAdrianaCreatoreKessels, W.M.M.W.M.M.KesselsVereecken, PhilippePhilippeVereecken2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28364Novel thin-film solid-composite electrolyte for 3D lithium-ion microbatteries by combining molecular and atomic layer depositionProceedings paperhttp://euromat2017.fems.eu/articlefiles/Final_EUROMAT2017_Web.pdf