Effect of Cu on Al interfacial mass transport in bamboo rie and damscene (AlCu)

Proost, JorisJorisProostLi, H.H.LiWitvrouw, AnnAnnWitvrouwMaex, KarenKarenMaex2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3767Effect of Cu on Al interfacial mass transport in bamboo rie and damscene (AlCu)Proceedings paper