Quantitative 2D-carrier profiling in semiconductors with sub-nm spatial resolution using SSRM

Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenDuhayon, NatasjaNatasjaDuhayonAlvarez, DavidDavidAlvarezFouchier, MarcMarcFouchierXu, MingweiMingweiXu2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8327Quantitative 2D-carrier profiling in semiconductors with sub-nm spatial resolution using SSRMOral presentation