Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors

Goux, LudovicLudovicGouxLisoni, JuditJuditLisoniSchwitters, MichaelMichaelSchwittersParaschiv, VasileVasileParaschivMaes, DavidDavidMaesHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersMenou, N.N.MenouTurquat, Ch.Ch.TurquatMadigou, V.V.MadigouMuller, Ch.Ch.MullerZambrano, R.R.Zambrano2021-10-162021-10-162005-09https://imec-publications.be/handle/20.500.12860/10517Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitorsJournal article