Growth and characterization of tensile-strained Ge layers on strain relaxed Ge1-xSnx buffer layers

Nakatsuka, OONakatsukaTakeuchi, ShotaroShotaroTakeuchiSakai, AASakaiOgawa, MMOgawaZaima, SSZaima2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12609Growth and characterization of tensile-strained Ge layers on strain relaxed Ge1-xSnx buffer layersProceedings paperhttp://www.murota.riec.tohoku.ac.jp/SiGeC2007/