Mortet, VincentVincentMortetZhang, L.L.ZhangEckert, M.M.EckertD'Haen, JanJanD'HaenSotani, A.A.SotaniMoreau, M.M.MoreauSaitner, M.M.SaitnerTroadec, D.D.TroadecNeyts, E.E.Neytsde Jaeger, J.C.J.C.de JaegerVerbeeck, J.J.VerbeeckBogaerts, A.A.BogaertsBoyen, H.G.H.G.BoyenVan Tendeloo, G.G.Van TendelooHaenen, KenKenHaenenWagner, PatrickPatrickWagner2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17655Properties of diamond films grown by MWPECVD with DC substrate biasMeeting abstract