Hydrogen passivation of HF-last cleaned (100) silicon surfaces: a MIR-FTIR study

Bender, HugoHugoBenderVerhaverbeke, StevenStevenVerhaverbekeHeyns, MarcMarcHeyns2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/493Hydrogen passivation of HF-last cleaned (100) silicon surfaces: a MIR-FTIR studyProceedings paper