Extending scanning spreading resistance microscopy towards three-dimensional quantitative carrier mapping in nanowire-based transistors

Schulze, AndreasAndreasSchulzeHantschel, ThomasThomasHantschelEyben, PierrePierreEybenVerhulst, AnneAnneVerhulstRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandoorenVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21483Extending scanning spreading resistance microscopy towards three-dimensional quantitative carrier mapping in nanowire-based transistorsOral presentation