Mangan, ShmoolikShmoolikManganJonckheere, RikRikJonckheereVan Den Heuvel, DieterDieterVan Den HeuvelRozentsvige, MosheMosheRozentsvigeKudriashov, VladislavVladislavKudriashovShoval, LiorLiorShovalSantoro, GaetanoGaetanoSantoroEnglard, IlanIlanEnglard2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17567EUV mask defectivity study by existing DUV tools and new EBEAM technologyOral presentation