Imaging of H2 bubbles and the related strain field in silicon wafers exposed to RF hydrogen plasma

Ghica, C.C.GhicaNistor, L.L.NistorRichard, OlivierOlivierRichardBender, HugoHugoBenderUlyashin, AliaksandrAliaksandrUlyashinVan Tendeloo, G.G.Van Tendeloo2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8960Imaging of H2 bubbles and the related strain field in silicon wafers exposed to RF hydrogen plasmaProceedings paper