Variability of quadruple-patterning interconnect processes

Baert, RogierRogierBaertCiofi, IvanIvanCiofiWilson, ChrisChrisWilsonVega Gonzalez, VictorVictorVega GonzalezBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiRyckaert, JulienJulienRyckaertRaghavan, PraveenPraveenRaghavanMercha, AbdelkarimAbdelkarimMerchaVerkest, DiederikDiederikVerkest2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24951Variability of quadruple-patterning interconnect processesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325645