Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide

Bernardini, S.S.BernardiniMasson, P.P.MassonHoussa, MichelMichelHoussaLalande, F.F.Lalande2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8568Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxideJournal article