Li, QiangQiangLiChen, ChengChengChenXu, ManzhangManzhangXuWang, YingnanYingnanWangWang, XuewenXuewenWangZhang, ZhiyongZhiyongZhangZhao, WuWuZhaoStiens, JohanJohanStiens2022-03-042021-11-022022-03-0420210169-4332WOS:000620362400007https://imec-publications.be/handle/20.500.12860/38126Blue-violet emission of silicon carbonitride thin films prepared by sputtering and annealing treatmentJournal article10.1016/j.apsusc.2021.149121WOS:000620362400007