Lorusso, GianGianLorussoSutani, TakeyoshiTakeyoshiSutaniRutigliani, VitoVitoRutiglianiVan Roey, FriedaFriedaVan RoeyMoussa, AlanAlanMoussaCharley, Anne-LaureAnne-LaureCharleyMack, ChrisChrisMackNaulleau, PatrickPatrickNaulleauPerera, ChamiChamiPereraConstantoudis, VassiliosVassiliosConstantoudisIkota, MasamiMasamiIkotaIshimoto, ToruToruIshimotoKoshihara, ShunshukeShunshukeKoshihara2021-10-252021-10-2520181932-5150https://imec-publications.be/handle/20.500.12860/31242Need for LWR metrology standardization: the imec roughness protocolJournal articlehttps://doi.org/10.1117/1.JMM.17.4.041009