Statistical model for SILC and pre-breakdown current jumps in ultra-thin oxide layers

Degraeve, RobinRobinDegraeveKaczer, BenBenKaczerSchuler, FranzFranzSchulerLorenzini, MartinoMartinoLorenziniWellekens, DirkDirkWellekensHendrickx, PaulPaulHendrickxVan Houdt, JanJanVan HoudtHaspeslagh, LucLucHaspeslaghTempel, GeorgGeorgTempelGroeseneken, GuidoGuidoGroeseneken2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5230Statistical model for SILC and pre-breakdown current jumps in ultra-thin oxide layersProceedings paper