Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma

Semenova, O.O.SemenovaSvitasheva, S.S.SvitashevaSharafutdinov, R.R.SharafutdinovKhmel, S.S.KhmelTschukin, V.V.TschukinPoortmans, JefJefPoortmansBilyalov, RenatRenatBilyalov2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6818Properties of silicon layers deposited from supersonic streams activated by electron-beam plasmaProceedings paper