Lerat, Jean-FrancoisJean-FrancoisLeratTous, LoicLoicTousNegru, RazvanRazvanNegruHuet, KarimKarimHuetEmeraud, ThierryThierryEmeraudJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21005Progress in nickel silicide formation using excimer laser annealing: a simulation studyProceedings paper