Potentials of the 90nm CMOS technology for monolithic integration

Mercha, AbdelkarimAbdelkarimMerchaJeamsaksiri, WutthinanWutthinanJeamsaksiriRamos, JavierJavierRamosLinten, DimitriDimitriLintenThijs, StevenStevenThijsJenei, SnezanaSnezanaJeneiWambacq, PietPietWambacqCarchon, GeertGeertCarchonDecoutere, StefaanStefaanDecoutere2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10883Potentials of the 90nm CMOS technology for monolithic integrationJournal article