A study on IMC morphology and integration flow for low temperature and high throughput TCB down to 10 mu m pitch microbumps

Derakhshandeh, JaberJaberDerakhshandehGerets, CarineCarineGeretsInoue, FumihiroFumihiroInoueCapuz, GiovanniGiovanniCapuzCherman, VladimirVladimirChermanLofrano, MelinaMelinaLofranoHou, LinLinHouCochet, TomTomCochetDe Preter, IngeIngeDe PreterWebers, TomasTomasWebersBex, PieterPieterBexJamieson, GeraldineGeraldineJamiesonMaehara, MasatakaMasatakaMaeharaShafahian, EhsanEhsanShafahianBertheau, JulienJulienBertheauBeyne, EricEricBeyneLa Tulipe, Douglas CharlesDouglas CharlesLa TulipeBeyer, GeraldGeraldBeyerVan der Plas, GeertGeertVan der PlasMiller, AndyAndyMiller2022-03-162022-03-1620210569-5503WOS:000702282700171https://imec-publications.be/handle/20.500.12860/39460A study on IMC morphology and integration flow for low temperature and high throughput TCB down to 10 mu m pitch microbumpsProceedings paper10.1109/ECTC32696.2021.00183978-0-7381-4523-5WOS:000702282700171