Hue, FlorentFlorentHueHoudellier, F.F.HoudellierBender, HugoHugoBenderSnoeck, E.E.SnoeckHytch, M.J.M.J.Hytch2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15505Strain measurements in transistors by dark-field holographyOral presentation