Put, BrechtBrechtPutAdelmann, ChristophChristophAdelmannSwerts, JohanJohanSwertsRooyackers, RitaRitaRooyackersTielens, HildeHildeTielensVan Elshocht, SvenSvenVan ElshochtHeyns, MarcMarcHeynsRadu, IulianaIulianaRadu2021-10-212021-10-2120132162-8726https://imec-publications.be/handle/20.500.12860/22962CMOS-compatible dielectric constant engineering by embedding metallic particles in aluminum oxideJournal articlehttp://ssl.ecsdl.org/content/2/1/N1.full.pdf+html