XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers

Conard, ThierryThierryConardDe Witte, HildeHildeDe WitteLoo, RogerRogerLooVerheyden, P.P.VerheydenVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymaxGijbels, RenaatRenaatGijbels2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3311XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layersJournal article