Soethoudt, JobJobSoethoudtGrillo, FabioFabioGrilloMarques, EstebanEstebanMarquesVan Ommen, RuudRuudVan OmmenBriggs, BasoeneBasoeneBriggsHody, HubertHubertHodySpampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetChan, BTBTChanDelabie, AnneliesAnneliesDelabie2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34040Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatternsOral presentation