Sun, XiaoXiaoSunPosada Quijano, GuillermoGuillermoPosada QuijanoMajeed, BivraghBivraghMajeedZhang, WenqiWenqiZhangDe Raedt, WalterWalterDe RaedtDiekmann, C.C.DiekmannEggs, C.C.EggsSchmidhammer, E.E.Schmidhammer2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/198523D stack packaging solution for FBAR devices_3D packaging demonstrator and RF performanceProceedings paper