Low-loss, multi-reticle stitched SiN waveguides for 300mm wafer-level optical interconnects

Xu, PengfeiPengfeiXuMarchese, ChiaraChiaraMarcheseLepage, GuyGuyLepageGolshani, NeginNeginGolshaniVan Eenaeme, RubenRubenVan EenaemeMingardi, AndreaAndreaMingardiVan Ongeval, JoostJoostVan OngevalMagdziak, RafalRafalMagdziakHalipre, LucLucHalipreTrivkovic, DarkoDarkoTrivkovicVerheyen, PeterPeterVerheyenChakrabarti, MaumitaMaumitaChakrabartiVelenis, DimitriosDimitriosVelenisMiller, AndyAndyMillerFerraro, FilippoFilippoFerraroBan, YoojinYoojinBanVan Campenhout, JorisJorisVan Campenhout2025-04-172024-10-172025-04-172024979-8-3503-7758-3N/AWOS:001242671400688https://imec-publications.be/handle/20.500.12860/44649Low-loss, multi-reticle stitched SiN waveguides for 300mm wafer-level optical interconnectsProceedings paper10.1364/OFC.2024.M4A.3WOS:001242671400688