Detalle, MikaelMikaelDetalleVandevelde, BartBartVandeveldeNolmans, PhilipPhilipNolmansMiller, AndyAndyMillerLa Manna, AntonioAntonioLa MannaBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25197Stress and bowing engineering in passive silicon interposerProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7159606