Kenens, ConnyConnyKenensDe Gendt, StefanStefanDe GendtKnotter, D. M.D. M.KnotterLoewenstein, LeeLeeLoewensteinMeuris, MarcMarcMeurisVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2662Efficiency of ozonated DI water in removing organic contaminationProceedings paper