Mathur, R.R.MathurBhargava, M.M.BhargavaAnnamalai, S.S.AnnamalaiChong, Y. K.Y. K.ChongSinha, S.S.SinhaCline, B.B.ClineKulkarni, J. P.J. P.KulkarniSalahuddin, Shairfe MuhammadShairfe MuhammadSalahuddinSchuddinck, PieterPieterSchuddinckRyckaert, JulienJulienRyckaertGupta, AnshulAnshulGupta2021-12-062021-12-062021-12-0620202380-9248WOS:000717011600151https://imec-publications.be/handle/20.500.12860/38565Buried Bitline for sub-5nm SRAM DesignProceedings paper10.1109/IEDM13553.2020.9372042978-1-7281-8888-1WOS:000717011600151