Effect of the composition of electrolyte on separation of porous silicon film by electrochemial etching

Solanki, Chetan SinghChetan SinghSolankiBilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmansNijs, JohanJohanNijs2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8163Effect of the composition of electrolyte on separation of porous silicon film by electrochemial etchingJournal article