AIN surface plasma treatment: Route towards selective diamond growth

Pobedinskas, PauliusPauliusPobedinskasFerraro, B.B.B.B.FerraroRuttens, BartBartRuttensD'Haen, JanJanD'HaenHaenen, KenKenHaenen2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22944AIN surface plasma treatment: Route towards selective diamond growthOral presentation