Sub-nanometer pore sealing solution of ultra- porous oxycarbosilane-based spin-on dielectrics

Armini, SilviaSilviaArmini2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23499Sub-nanometer pore sealing solution of ultra- porous oxycarbosilane-based spin-on dielectricsProceedings paper