Integration of 0/1-level packaged RF-MEMS devices on MCM-D at millimeter-wave frequencies

Carchon, GeertGeertCarchonJourdain, AnneAnneJourdainVendier, OlivierOlivierVendierSchoebel, JoergJoergSchoebelTilmans, HarrieHarrieTilmans2021-10-162021-10-162007-08https://imec-publications.be/handle/20.500.12860/11827Integration of 0/1-level packaged RF-MEMS devices on MCM-D at millimeter-wave frequenciesJournal article