Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta

Tokei, ZsoltZsoltTokeiKelleher, Deirdre MariaDeirdre MariaKelleherMebarki, BencherkiBencherkiMebarkiMandrekar, T.T.MandrekarGuggilla, S.S.GuggillaMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8219Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/TaJournal article