Local oxidation of silicon and titanium surfaces with a scanning probe microsope

Vullers, R. J. M.R. J. M.VullersDaniels, H.H.DanielsMaenhoudt, MireilleMireilleMaenhoudtVan Haesendonck, ChrisChrisVan HaesendonckVan Hove, MarleenMarleenVan Hove2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1642Local oxidation of silicon and titanium surfaces with a scanning probe microsopeOral presentation