Lozano, M.M.LozanoSantander, J.J.SantanderCabruja, E.E.CabrujaPerello, CarlesCarlesPerelloUllan, M.M.UllanLora-Tamayo, E.E.Lora-TamayoDoyle, R.R.DoyleMcCarthy, C.C.McCarthyBarton, J.J.Barton2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3635Test structures for MCM-D technology characterizationJournal article