Heyne, MarkusMarkusHeyneChiappe, DanieleDanieleChiappeMeersschaut, JohanJohanMeersschautNuytten, ThomasThomasNuyttenConard, ThierryThierryConardRichard, OlivierOlivierRichardBender, HugoHugoBenderMoussa, AlainAlainMoussaHuyghebaert, CedricCedricHuyghebaertRadu, IulianaIulianaRaduCaymax, MattyMattyCaymaxde Marneffe, Jean-FrancoisJean-Francoisde MarneffeNeyts, Erik C.Erik C.NeytsDe Gendt, StefanStefanDe Gendt2021-10-232021-10-232016-012050-7526https://imec-publications.be/handle/20.500.12860/26722Multilayer MoS2 growth by metal and metal oxide sulfurizationJournal articlehttp://dx.doi.org/10.1039/C5TC04063A