Philipsen, VickyVickyPhilipsenMochi, IacopoIacopoMochiVan Look, LieveLieveVan LookLorusso, GianGianLorussoLuong, VuVuLuongHendrickx, EricEricHendrickxWittebrood, FrisoFrisoWittebroodSchiffelers, GuidoGuidoSchiffelersvan Setten, EelcoEelcovan SettenFliervoet, TimonTimonFliervoetDusa, MirceaMirceaDusa2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25758NXE:3300 insertion for N7 : status and challengesProceedings paper