Thin film InGaAs/InAIAs photodetectors integrated on a silicon-on-insulator waveguide substrate

Brouckaert, JoostJoostBrouckaertRoelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/11813Thin film InGaAs/InAIAs photodetectors integrated on a silicon-on-insulator waveguide substrateProceedings paper