Direct correlation between mask registration and on-wafer measurements for individual logic device features

van Haren, Richard J. F.Richard J. F.van HarenSteinert, SteffenSteffenSteinertMouraille, OrionOrionMourailleKasperkiewicz, EwaEwaKasperkiewiczHermans, JanJanHermansHasan, MahmudulMahmudulHasanvan Dijk, LeonLeonvan DijkBeyer, DirkDirkBeyer2023-04-282023-02-152023-02-162023-04-2820220277-786XWOS:000905312400019https://imec-publications.be/handle/20.500.12860/41097Direct correlation between mask registration and on-wafer measurements for individual logic device featuresProceedings paper10.1117/12.2641618978-1-5106-5642-0WOS:000905312400019