Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films

Sun, YitingYitingSunLevrau, ElisabethElisabethLevrauZhang, LipingLipingZhangGeypen, JefJefGeypenMeersschaut, JohanJohanMeersschautFranquet, AlexisAlexisFranquetLe, Quoc ToanQuoc ToanLede Marneffe, Jean-FrancoisJean-Francoisde MarneffeBender, HugoHugoBenderStruyf, HerbertHerbertStruyfDetavernier, ChristopheChristopheDetavernierBaklanov, MikhaïlMikhaïlBaklanovDe Feyter, StevenStevenDe FeyterArmini, SilviaSilviaArmini2021-10-222021-10-2220150167-9317https://imec-publications.be/handle/20.500.12860/25953Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG filmsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931714004572