Effect of the Ge-molefraction on the subthreshold slope and leakage current of vertical Si/Si1-xGex MOSFETs

Collaert, NadineNadineCollaertDe Meyer, KristinKristinDe Meyer2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3307Effect of the Ge-molefraction on the subthreshold slope and leakage current of vertical Si/Si1-xGex MOSFETsJournal article