Goux, LudovicLudovicGouxParaschiv, VasileVasileParaschivBoullart, WernerWernerBoullartLisoni, JuditJuditLisoniSchwitters, M.M.SchwittersMaes, DavidDavidMaesHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersCaputa, ConcettaConcettaCaputaCasella, P.P.CasellaZambrano, R.R.ZambranoVecchio, G.G.VecchioMonchoix, H.H.Monchoix2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8975Influence of metal and SBT dry-etch on FeCAP properties and role of recovery annealsOral presentation