Nucleation and adhesion of ultra-thin copper films on amino-terminated self-assembled monolayers

Bogan, JustinJustinBoganBrady-Boyd, AnitaAnitaBrady-BoydArmini, SilviaSilviaArminiLundy, R.R.LundySelvaraju, V.V.SelvarajuO'Connor, RobertRobertO'Connor2021-10-252021-10-2520180169-4332https://imec-publications.be/handle/20.500.12860/30279Nucleation and adhesion of ultra-thin copper films on amino-terminated self-assembled monolayersJournal articlehttps://doi.org/10.1016/j.apsusc.2018.08.029