Al3Sc thin films as alternative interconnect metallization

Soulie, Jean-PhilippeJean-PhilippeSoulieAdelmann, ChristophChristophAdelmannSwerts, JohanJohanSwertsTokei, ZsoltZsoltTokei2024-01-162022-10-102024-01-162022-03-28https://imec-publications.be/handle/20.500.12860/40549Al3Sc thin films as alternative interconnect metallizationOral presentationinterconnectnano ICaluminides