Relationship between structural changes, hydrogen content and annealing in stacks of ultrathin Si/Ge amorphous layers

Frigeri, C.C.FrigeriSerenyi, M.M.SerenyiNguyen, Q.K.Q.K.NguyenCsik, A.A.CsikRiesz, F.F.RieszErdelyi, Z.Z.ErdelyiNasi, L.L.NasiBeke, D.L.D.L.BekeBoyen, Hans-GerdHans-GerdBoyen2021-10-192021-10-1920111931-7573https://imec-publications.be/handle/20.500.12860/18936Relationship between structural changes, hydrogen content and annealing in stacks of ultrathin Si/Ge amorphous layersJournal article