Observation of critical gate oxide thickness for substrate-defect related oxide failure

Bearda, TwanTwanBeardaHoussa, MichelMichelHoussaMertens, PaulPaulMertensVanhellemont, JanJanVanhellemontHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3215Observation of critical gate oxide thickness for substrate-defect related oxide failureJournal article