Atanasova, TanyaTanyaAtanasovaCaluwaerts, RudyRudyCaluwaertsCarbonell, LaureLaureCarbonellStrubbe, KatrienKatrienStrubbeVereecken, PhilippePhilippeVereecken2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18499Ultra-low copper baths for sub-30nm copper interconnectsMeeting abstract